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Microfabrication

Microfabrication is the process of fabricating miniature structures of micrometre scales and smaller. Historically, the earliest microfabrication processes were used for integrated circuit fabrication, also known as "semiconductor manufacturing" or "semiconductor device fabrication". In the last two decades, microelectromechanical systems (MEMS)…

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Overview

Fields of use

Origins

Processes

Cleanliness in wafer fabrication

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Map overview Semantic statistics

Microfabrication

Nodes106
Edges105
Triples57
Avg. degree1.98
Density0.018868
Components1

How this topic connects Entity context

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Microfabrication

Top relations

related to Cleanliness in wafer fabrication · 13
Microfabrication → Cleanrooms, CMOS, Dry, Hydrogen, MOS, Oxidation, Piranha, Pre-gate, RCA-1, RCA-2, Smoke, Sulfuric, These
related to Processes · 10
Microfabrication → Electroplating, For, Modern, Polishing, Some, The, These, Thin, This, To
related to Microforming · 7
Microfabrication → Chan, Fu, However, It, MEMS, Microforming, These
related to Origins · 6
Microfabrication → DVDs, For, MEMS, Micromachining, This, Traditional
related to Patterning · 5
Microfabrication → Examples, It, PhotolithographyShadow, These, This
related to External links · 4
Microfabrication → Archived, MicroManufacturing Conference, Videos, Wayback Machine
is a · 2
Microfabrication → broad general term.Traditional machining techniques such as electro-discharge machining, process of fabricating miniature structures of micrometre scales and smaller
see also · 1
Microfabrication → Manufacturing

Important terminology Word statistics

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Important terminology

also fabrication etching mems devices processes techniques film include many manufacturing surface cleaning device films substrate steps thin size process

Entity relationships Subject–Predicate–Object triples

SubjectPredicateObjectConfidenceSrc
Microfabricationis aprocess of fabricating miniature structures of micrometre scales and smaller0.90text
Microfabricationis abroad general term.Traditional machining techniques such as electro-discharge machining0.90text
electro-discharge machininginstance ofbut microfabrication is the broad general term.Traditional machining techniques0.80text
spark erosion machininginstance ofbut microfabrication is the broad general term.Traditional machining techniques0.80text
and laser drilling have been scaled from the millimeter size range to micrometer rangeinstance ofbut microfabrication is the broad general term.Traditional machining techniques0.80text
but they do not share the main idea of microelectronics-originated microfabricationinstance ofbut microfabrication is the broad general term.Traditional machining techniques0.80text
silicon wafers can be usedinstance ofsemiconducting substrates0.80text
glass or quartz are commoninstance oftransparent substrates0.80text
microextrusioninstance ofIt includes techniques0.80text
microstampinginstance ofIt includes techniques0.80text
and microcuttinginstance ofIt includes techniques0.80text
Microfabricationrelated to Cleanliness in wafer fabricationSmoke0.60section

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    Min side: 3
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