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Microlithography

Microlithography is a general name for any manufacturing process that can create a minutely patterned thin film of protective materials over a substrate, such as a silicon wafer, in order to protect selected areas of it during subsequent etching, deposition, or implantation operations. The term is normally used for processes that can reliably produce…

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Microlithography

Nodes31
Edges30
Triples8
Avg. degree1.94
Density0.064516
Components1

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Microlithography

Top relations

related to Processes · 4
Microlithography → Electron, NanoimprintingInterference, Photolithography, Specific
is a · 2
Microlithography → general name for any manufacturing process that can create a minutely patterned thin film of protective materials over a substrate, microfabrication process that is extensively used in the semiconductor industry and also manufactures microelectromechanical systems
has application · 2
Microlithography → The, They

Important terminology Word statistics

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Important terminology

used processes produce features also process term less lithography create film microscopic size photolithography silicon wafer etching deposition implantation micrometres

Entity relationships Subject–Predicate–Object triples

SubjectPredicateObjectConfidenceSrc
Microlithographyis ageneral name for any manufacturing process that can create a minutely patterned thin film of protective materials over a substrate0.90text
Microlithographyis amicrofabrication process that is extensively used in the semiconductor industry and also manufactures microelectromechanical systems0.90text
Microlithographyhas applicationThe0.60section
Microlithographyhas applicationThey0.60section
Microlithographyrelated to ProcessesSpecific0.60section
Microlithographyrelated to ProcessesPhotolithography0.60section
Microlithographyrelated to ProcessesElectron0.60section
Microlithographyrelated to ProcessesNanoimprintingInterference0.60section

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    Min side: 3
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