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Etching (microfabrication)

Etching is used in microfabrication to chemically remove layers from the surface of a wafer during manufacturing. Etching is a critically important process module in fabrication, and every wafer undergoes many etching steps before it is complete.

Technology, Etching media and technology & Figures of merit

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Etching media and technology

LiquidPlasmaBuffered hydrofluoric acidSilicon dioxideSilicon
43 related topics

Figures of merit

UndercutIsotropicAnisotropic
3 related topics

Overview

MicrofabricationWaferPhotoresistPhotolithographySilicon nitride
5 related topics

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Etching media and technology

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Etching (microfabrication)

Nodes55
Edges54
Triples0
Avg. degree1.96
Density0.036364
Components1

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Important terminology

etching wafer plasma silicon etch used anisotropic etchants wet surface masking material processes process isotropic use selectivity 111 etchant photoresist

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