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Semiconductor device fabrication

Semiconductor device fabrication is the process used to manufacture semiconductor devices, typically integrated circuits (ICs) such as microprocessors, microcontrollers, and memories (such as RAM and flash memory). It is a multiple-step photolithographic and physico-chemical process, with steps such as thermal oxidation, thin-film deposition, ion…

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Overview

Feature size

History

Prevention of contamination and defects

Wafers

Processing

Wafer metrology

Device test

Die preparation

Packaging

Hazardous materials

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Semiconductor device fabrication

Nodes188
Edges187
Triples95
Avg. degree1.99
Density0.010638
Components1

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Semiconductor device fabrication

Top relations

related to Processing · 25
Semiconductor device fabrication → After, ALD, Annealing, Available, CMP, CVD, Deposition, Doping, Dry, ECD, For, Implanters, In, Initially, Ion, LOCOS, MBE, Modification, Patterning, PVD
is a · 1
Semiconductor device fabrication → process used to manufacture semiconductor devices

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Important terminology

wafer process used semiconductor wafers silicon also chips transistors processing fabrication nm yield devices transistor many called foups node etching

Entity relationships Subject–Predicate–Object triples

SubjectPredicateObjectConfidenceSrc
Semiconductor device fabricationis aprocess used to manufacture semiconductor devices0.90text
thermal oxidationinstance ofwith steps0.80text
thin-film depositioninstance ofwith steps0.80text
ion implantationinstance ofwith steps0.80text
and etchinginstance ofwith steps0.80text
during which electronic circuits are gradually created on a waferinstance ofwith steps0.80text
typically made of pure single-crystal semiconducting materialinstance ofwith steps0.80text
etchinginstance ofSteps0.80text
photolithography can be used to manufacture other devicesinstance ofSteps0.80text
such as LCDinstance ofSteps0.80text
OLED displays.The fabrication process is performed in highly specialized semiconductor fabrication plantsinstance ofSteps0.80text
also called foundries orinstance ofSteps0.80text

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