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Stepper

A stepper or wafer stepper is a device used in the manufacture of integrated circuits (ICs). It is an essential part of the process of photolithography, which creates millions of microscopic circuit elements on the surface of silicon wafers out of which chips are made. It is similar in operation to a slide projector or a photographic enlarger. The ICs…

History & Art

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History

Jay LathropDiamond Ordnance Fuze LaboratoriesSilicon dioxideTexas InstrumentsJack Kilby
18 related topics

Illumination and the challenges of improving resolution

WavelengthLightNanoimprint lithographyDiffractionNumerical aperture
23 related topics

The stepper's role in photolithography

BoulePhotomaskPhotoresistUltravioletSolvents
10 related topics

Basic operation

RobotChromeQuartzWorm screwsLinear motors
5 related topics

Topics to explore

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Overview

History

The stepper's role in photolithography

Major subassemblies

Basic operation

Illumination and the challenges of improving resolution

Advanced semantic analysis

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Map overview Semantic statistics

Stepper

Nodes76
Edges75
Triples26
Avg. degree1.97
Density0.026316
Components1

How this topic connects Entity context

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Stepper

Top relations

related to Aligners vs. steppers · 11
Stepper → As, Before, Between, During, GCA, ICs, In, Masks, Moore's, The, This
related to Scanners · 5
Stepper → Also, Instead, Modern, The, There
related to Illumination and the challenges of improving resolution · 4
Stepper → An, As, The, This
related to Basic operation · 2
Stepper → The, This
related to Major subassemblies · 2
Stepper → Process, The
is a · 1
Stepper → device used in the manufacture of integrated circuits
see also · 1
Stepper → Stepping

Important terminology Word statistics

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Important terminology

wafer light reticle mask process used systems steppers system step-and-scan exposure exposed time resolution illumination photoresist photolithography surface many semiconductor

Entity relationships Subject–Predicate–Object triples

SubjectPredicateObjectConfidenceSrc
Stepperis adevice used in the manufacture of integrated circuits0.90text
Stepperrelated to Aligners vs. steppersBefore0.60section
Stepperrelated to Aligners vs. steppersMasks0.60section
Stepperrelated to Aligners vs. steppersICs0.60section
Stepperrelated to Aligners vs. steppersBetween0.60section
Stepperrelated to Aligners vs. steppersDuring0.60section
Stepperrelated to Aligners vs. steppersAs0.60section
Stepperrelated to Aligners vs. steppersMoore's0.60section
Stepperrelated to Aligners vs. steppersIn0.60section
Stepperrelated to Aligners vs. steppersGCA0.60section
Stepperrelated to Aligners vs. steppersThis0.60section
Stepperrelated to Aligners vs. steppersThe0.60section

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