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MEMS

MEMS (micro-electromechanical systems) is the technology of microscopic devices incorporating both electronic and moving parts. MEMS are made up of components between 1 and 100 micrometres in size (i.e., 0.001 to 0.1 mm), and MEMS devices generally range in size from 20 micrometres to a millimetre (i.e., 0.02 to 1.0 mm), although components arranged in…

History, Applications, Art & Technology

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MEMS

Nodes146
Edges145
Triples112
Avg. degree1.99
Density0.013699
Components1

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MEMS

Top relations

has application · 30
MEMS → Accelerometers, Also, AR, Bio-MEMS, Canon Digital IXUS, Displays, DLP, DMD, Fluid, HTC PDA, IMOD, IMUs, Inertial, Inkjet, INSs, Interferometric, LiDAR, MEMS-based, Micro-scale, Micromachined
related to history · 30
MEMS → An, Another, CMOS, Co-PI, DARPA, During, Grace, Harvey, Hyannis, IEEE Micro Robots, IEEE Proceedings Micro Robots, Jacobsen, July, MA Nov, Micro Electro-Mechanical Systems, MOSFET, Nathanson, PI, Raymond, Robert
related to Industry structure · 9
MEMS → Both, Companies, Global MEMS/Microsystems Markets, Larger, Opportunities, SEMI, Smaller, The, Yole Development
related to Lithography · 8
MEMS → If, Lithography, One, Photolithography, Sometimes, SU8, Then, This
related to Manufacturing technologies · 7
MEMS → Analog Devices, Bulk, Interdigital, Silicon, Surface, The, This MEMS
related to External links · 5
MEMS → August, Chollet, HB, ISBN, Liu
related to Deposition processes · 3
MEMS → One, The NEMS, There
related to Types · 3
MEMS → Ohmic, Ohmic MEMS, There
related to Materials · 1
MEMS → The

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etching used silicon material surface devices wafer technology chemical process also wet deposition substrate etch micromachining processes two using systems

Entity relationships Subject–Predicate–Object triples

SubjectPredicateObjectConfidenceSrc
microprocessorinstance ofan integrated circuit chip0.80text
injection moldinginstance ofMEMS devices can be made from polymers by processes0.80text
embossing or stereolithographyinstance ofMEMS devices can be made from polymers by processes0.80text
are especially well suited to microfluidic applications such as disposable blood testing cartridgesinstance ofMEMS devices can be made from polymers by processes0.80text
lightinstance ofto grow a thin surface layer of silicon dioxide.PatterningPatterning is the transfer of a pattern into a material.LithographyLithography in a MEMS context is typically the trans…0.80text
siliconinstance ofIt is achieved by the lithographic application of diamond films to a substrate0.80text
lightinstance ofLithographyLithography in a MEMS context is typically the transfer of a pattern into a photosensitive material by selective exposure to a radiation source0.80text
game controllersinstance ofthe autopilot of an airplane.Accelerometers in consumer electronics devices0.80text
in-ear headphonesinstance ofelectrostatic and electromagnetic micro harvesters.Micromachined ultrasound transducers.MEMS-based loudspeakers focusing on applications0.80text
hearing aids.MEMS oscillators.MEMS-based scanning probe microscopes including atomic force microscopes.LiDARinstance ofelectrostatic and electromagnetic micro harvesters.Micromachined ultrasound transducers.MEMS-based loudspeakers focusing on applications0.80text
automobile airbag systemsinstance ofwhich includes products0.80text
display systemsinstance ofwhich includes products0.80text

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