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Sputtering

In physics, sputtering is a phenomenon in which microscopic particles of a solid material are ejected from its surface, after the material is itself bombarded by energetic particles of a plasma or gas. It occurs naturally in outer space, and can be an unwelcome source of wear in precision components. However, the fact that it can be made to act on…

Applications & Art

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Applications and phenomena

Kinetic energyEVDirect currentAlternating currentRF
31 related topics

Physics

MomentumHeat spikeBinding energyCrystalIon sources
11 related topics

Etching and chemical sputtering

Inert gasIon millingReactive-ion etchingSecondary ion mass spectrometry
4 related topics

Electronic sputtering

Stopping powerInsulatorsEuropa
3 related topics

Topics to explore

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Overview

Physics

Electronic sputtering

Potential sputtering

Etching and chemical sputtering

Applications and phenomena

Advanced semantic analysis

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Map overview Semantic statistics

Sputtering

Nodes68
Edges67
Triples86
Avg. degree1.97
Density0.029412
Components1

How this topic connects Entity context

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Sputtering

Top relations

related to External links · 19
Sputtering → Archived, Basics, Bibcode, Cuomo, Displacement Cascade, Harper, Ion, Journal, Kalypso, Kaufman, Part, Re, Technology, The, Thin Film Evaporation GuideWhat, Vacuum Science, Wayback Machine, Wayback MachineAmerican Vacuum Society, YouTube
related to Sputter cleaning · 12
Sputtering → Burger, Farnsworth, George, In, It, LEED, Often, Redeposition, Schlier, Sputter, Surfaces, When
related to Electronic sputtering · 7
Sputtering → Electronic, Europa, H2O, Jupiter's, MeV, One, The
related to Etching and chemical sputtering · 6
Sputtering → Reactive, Removing, RIE, Si, SIMS, The
related to For analysis · 6
Sputtering → Another, As, Furthermore, In, One, SIMS
related to In space · 5
Sputtering → Europa, Mars, Mercury, Moon, On
related to Physics · 5
Sputtering → If, Such, These, This, When
has application · 4
Sputtering → DC, MHz, RF, When
related to Film deposition · 4
Sputtering → Resputtering, SiO2, Sputter, Sputtered
related to Etching · 3
Sputtering → In, One, Sputter

Important terminology Word statistics

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Important terminology

target surface ions sputter ion energy material plasma etching atoms deposition used physical also process sputtered solid thin potential cleaning

Entity relationships Subject–Predicate–Object triples

SubjectPredicateObjectConfidenceSrc
Sputteringis aphenomenon in which microscopic particles of a solid material are ejected from its surface0.90text
overheatinginstance ofSputter cleaning has some potential problems0.80text
gas incorporation in the surface regioninstance ofSputter cleaning has some potential problems0.80text
bombardmentinstance ofSputter cleaning has some potential problems0.80text
pinning of the Fermi levelinstance ofthere may be inevitable interfacial consequences0.80text
caused by damage-related interface gap statesinstance ofthere may be inevitable interfacial consequences0.80text
resulting in the formation of Schottky-barrier impeding carrier transportinstance ofthere may be inevitable interfacial consequences0.80text
telescopesinstance ofensuring high reflectivity and durability for applications0.80text
camerasinstance ofensuring high reflectivity and durability for applications0.80text
and laser systemsinstance ofensuring high reflectivity and durability for applications0.80text
Sputteringhas applicationWhen0.60section
Sputteringhas applicationDC0.60section

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    Min side: 3
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