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Radio-frequency microelectromechanical system

A radio-frequency microelectromechanical system (RF MEMS) is a microelectromechanical system with electronic components comprising moving sub-millimeter-sized parts that provide radio-frequency (RF) functionality. RF functionality can be implemented using a variety of RF technologies. Besides RF MEMS technology, III-V compound semiconductor (GaAs, GaN…

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Overview

Components

Biasing

Packaging

Microfabrication

Reliability

  • MW Milliwatt

Applications

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  • ISBN ISBN (identifier)

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Radio-frequency microelectromechanical system

Nodes192
Edges191
Triples0
Avg. degree1.99
Density0.010417
Components1

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rf mems switches beam components fig packaging switched phase varactors shifters based capacitors capacitive dielectric ohmic require shown voltage filters

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