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In the microelectronics industry, a semiconductor fabrication plant, also called a fab or a foundry, is a factory where integrated circuits (ICs) are manufactured.
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fab also semiconductor cleanroom equipment new companies fabs fabrication designs wafers may often integrated clean chips foundry several billion photolithography
| Subject | Predicate | Object | Confidence | Src |
|---|---|---|---|---|
| steppers and/or scanners for photolithography | instance of | are manufactured.The cleanroom is where all fabrication takes place and contains the machinery for integrated circuit production | 0.80 | text |
| etching | instance of | are manufactured.The cleanroom is where all fabrication takes place and contains the machinery for integrated circuit production | 0.80 | text |
| cleaning | instance of | are manufactured.The cleanroom is where all fabrication takes place and contains the machinery for integrated circuit production | 0.80 | text |
| and doping.Prices for pieces of equipment for the processing of 300mm wafers range to upwards of | instance of | are manufactured.The cleanroom is where all fabrication takes place and contains the machinery for integrated circuit production | 0.80 | text |
| chemical delivery | instance of | the clean subfab that may contain support equipment for the machines in the cleanroom | 0.80 | text |
| purification | instance of | the clean subfab that may contain support equipment for the machines in the cleanroom | 0.80 | text |
| recycling | instance of | the clean subfab that may contain support equipment for the machines in the cleanroom | 0.80 | text |
| destruction systems | instance of | the clean subfab that may contain support equipment for the machines in the cleanroom | 0.80 | text |
| and the ground floor | instance of | the clean subfab that may contain support equipment for the machines in the cleanroom | 0.80 | text |
| that may contain electrical equipment | instance of | the clean subfab that may contain support equipment for the machines in the cleanroom | 0.80 | text |
| Semiconductor fabrication plant | see also | Foundry | 0.60 | section |
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