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White light interferometry is a non-contact optical method for surface height measurement on 3D structures with surface profiles varying between tens of nanometers and a few centimeters. It is often used as an alternative name for coherence scanning interferometry in the context of areal surface topography instrumentation that relies on…
Measurement, Relation between spectral width and coherence length & Basic principles
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light correlogram length coherence surface interference reference white measurement modulation pixel envelope object interferometry ccd positioning stage optical source displaystyle
| Subject | Predicate | Object | Confidence | Src |
|---|---|---|---|---|
| the spatial coherence of the light source | instance of | as well as on structural aspects | 0.80 | text |
| the numerical aperture | instance of | as well as on structural aspects | 0.80 | text |
| White light interferometry | related to Basic principles | Interferometry | 0.60 | section |
| White light interferometry | related to Basic principles | This | 0.60 | section |
| White light interferometry | related to Basic principles | While | 0.60 | section |
| White light interferometry | related to Basic principles | Yuri Denisyuk | 0.60 | section |
| White light interferometry | related to Basic principles | Emmett Leith | 0.60 | section |
| White light interferometry | related to Basic principles | Even | 0.60 | section |
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