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Coherence scanning interferometry

Coherence scanning interferometry (CSI) is any of a class of optical surface measurement methods wherein the localization of interference fringes during a scan of optical path length provides a means to determine surface characteristics such as topography, transparent film structure, and optical properties. CSI is currently the most common interference…

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Coherence scanning interferometry

Nodes8
Edges7
Triples3
Avg. degree1.75
Density0.25
Components1

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Important terminology

csi interference surface localization topography measurement technique fringe iso coherence scanning interferometry class optical methods wherein fringes scan path length

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SubjectPredicateObjectConfidenceSrc
topographyinstance ofis any of a class of optical surface measurement methods wherein the localization of interference fringes during a scan of optical path length provides a means to determine surf…0.80text
transparent film structureinstance ofis any of a class of optical surface measurement methods wherein the localization of interference fringes during a scan of optical path length provides a means to determine surf…0.80text
and optical propertiesinstance ofis any of a class of optical surface measurement methods wherein the localization of interference fringes during a scan of optical path length provides a means to determine surf…0.80text

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