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Secondary-ion mass spectrometry (SIMS) is a technique used to analyze the composition of solid surfaces and thin films by sputtering the surface of the specimen with a focused primary ion beam and collecting and analyzing ejected secondary ions. The mass/charge ratios of these secondary ions are measured with a mass spectrometer to determine the…
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sims ion mass ions surface primary used secondary secondary-ion beam static type pulsed gun analysis spectrometry composition elemental analyzer sector
| Subject | Predicate | Object | Confidence | Src |
|---|---|---|---|---|
| Secondary-ion mass spectrometry | Acronym | SIMS | 1.00 | infobox |
| Secondary-ion mass spectrometry | Analytes | Solid surfaces, thin films | 1.00 | infobox |
| Secondary-ion mass spectrometry | Classification | Mass spectrometry | 1.00 | infobox |
| Secondary-ion mass spectrometry | Related | Fast atom bombardment Microprobe | 1.00 | infobox |
| SF5 | instance of | or even ionized molecules | 0.80 | text |
| Secondary-ion mass spectrometry | has application | The COSIMA | 0.60 | section |
| Secondary-ion mass spectrometry | has application | Rosetta | 0.60 | section |
| Secondary-ion mass spectrometry | has application | Churyumov | 0.60 | section |
| Secondary-ion mass spectrometry | has application | Gerasimenko | 0.60 | section |
| Secondary-ion mass spectrometry | has application | SIMS | 0.60 | section |
| Secondary-ion mass spectrometry | has application | More | 0.60 | section |
| Secondary-ion mass spectrometry | has application | NanoSIMS | 0.60 | section |
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