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Phase-shifting interferometry

Phase-shifting interferometry (PSI) is an optical metrology technique for measuring surface topography and wavefront shape to sub-nanometre precision. It works by recording a short sequence of interferograms, each captured with a known phase offset between the reference and object beams, then solving for the surface height at every pixel simultaneously.…

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Phase-shifting interferometry

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Avg. degree1.78
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psi surface phase optical height step algorithm metrology precision known reference pixel standard fringe wavefront interferograms often pzt steps frames

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