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The gate oxide is the dielectric layer that separates the gate terminal of a MOSFET (metal–oxide–semiconductor field-effect transistor) from the underlying source and drain terminals as well as the conductive channel that connects source and drain when the transistor is turned on. Gate oxide is formed by thermal oxidation of the silicon of the channel to…
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gate oxide layer channel silicon conductor metal transistor conductive thin electric electrode may dielectric dioxide semiconductor source drain formed oxidation
| Subject | Predicate | Object | Confidence | Src |
|---|---|---|---|---|
| Gate oxide | is a | dielectric layer that separates the gate terminal of a MOSFET | 0.90 | text |
| Gate oxide | is a | thin electrode layer made of a conductor which can be aluminium | 0.90 | text |
| Gate oxide | is a | thin n-type inversion layer on the surface of the p-type semiconductor substrate | 0.90 | text |
| tungsten | instance of | a refractory metal | 0.80 | text |
| a silicide | instance of | a refractory metal | 0.80 | text |
| Gate oxide | related to history | In | 0.60 | section |
| Gate oxide | related to history | Carl Frosch | 0.60 | section |
| Gate oxide | related to history | Lincoln Derrick | 0.60 | section |
| Gate oxide | related to history | Bell Labs | 0.60 | section |
| Gate oxide | related to history | By | 0.60 | section |
| Gate oxide | related to history | Frosch | 0.60 | section |
| Gate oxide | related to history | Derrick | 0.60 | section |
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