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Cryopump

A cryopump or a "cryogenic pump" is a vacuum pump that traps gases and vapours by condensing them on a cold surface, but are only effective on some gases. The effectiveness depends on the freezing and boiling points of the gas relative to the cryopump's temperature. They are sometimes used to block particular contaminants, for example in front of a…

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Cryopump

Nodes32
Edges31
Triples43
Avg. degree1.94
Density0.0625
Components1

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Cryopump

Top relations

related to history · 18
Cryopump → Arthur, Cryogenic Technology Inc, Early, Gifford, Gifford-McMahon, Helix, Helix Technology Corporation, Howard, However, IBM's, In, Little Inc, Massachusetts-based, McMahon, The, This, ULVAC, William
related to Operation · 8
Cryopump → Baffles, Cryopumps, It, Over, Saturation, The, These, Torr
related to Regeneration · 5
Cryopump → Adding, During, Most, Regeneration, Water
is a · 1
Cryopump → process of evaporating the trapped gases

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Important terminology

vacuum cold gases surface cryopumps pump regeneration used molecules helium low time hydrogen nitrogen temperature water technology trapped temperatures also

Entity relationships Subject–Predicate–Object triples

SubjectPredicateObjectConfidenceSrc
Cryopumpis aprocess of evaporating the trapped gases0.90text
a cryogenics company founded jointly by Helixinstance ofwith expansions0.80text
ULVACinstance ofwith expansions0.80text
waterinstance ofThe outer stages condense high boiling point gases0.80text
oilinstance ofThe outer stages condense high boiling point gases0.80text
thus saving the surface areainstance ofThe outer stages condense high boiling point gases0.80text
refrigeration capacity of the inner stages for lower boiling point gases such as nitrogen.As cooling temperatures decrease when using dry iceinstance ofThe outer stages condense high boiling point gases0.80text
liquid nitrogeninstance ofThe outer stages condense high boiling point gases0.80text
then compressed heliuminstance ofThe outer stages condense high boiling point gases0.80text
lower molecular-weight gases can be trappedinstance ofThe outer stages condense high boiling point gases0.80text
activated charcoal or a zeoliteinstance ofthe lighter gases helium and hydrogen have very low trapping efficiency and are the predominant molecules in ultra-high vacuum systems.Cryopumps are often combined with sorption…0.80text
water vaporinstance ofallowing trapped gases to change from a solid state to a gaseous state and thereby be released from the cryopump through a pressure relief valve into the atmosphere.Most product…0.80text

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